Sputter deposition - LNF Wiki
Monte Carlo simulations of sputter deposition and step coverage of thin films - ScienceDirect
IPCI ::
Radical step coverage improvement in directional beam target (DBT) sputter - ScienceDirect
Coatings | Free Full-Text | Optical Constant and Conformality Analysis of SiO2 Thin Films Deposited on Linear Array Microstructure Substrate by PECVD | HTML
Enhanced step coverage by oblique angle physical vapor deposition: Journal of Applied Physics: Vol 97, No 12
Step coverage obtained from experiments and the corresponding... | Download Scientific Diagram
Comparison of step coverage of SrO films deposited with: a PEALD and b... | Download Scientific Diagram
Effects of deposition conditions on step-coverage quality in low-pressure chemical vapor deposition of HfO2 - ScienceDirect
Korean Journal of Metals and Materials
Enhanced step coverage by oblique angle physical vapor deposition: Journal of Applied Physics: Vol 97, No 12
PPT - Sputtering PowerPoint Presentation, free download - ID:364431
Step coverage study of indium-tin-oxide thin films by spray CVD on non-flat substrates at different temperatures - ScienceDirect
Dependence of step coverage on deposition temperature. Step coverage is... | Download Scientific Diagram
Step coverage of the fine grain CVD-W films with different deposition... | Download Scientific Diagram
Optimizing of process parameter and further step coverage improving regarding copper seed deposition for 50nm NAND flash | Semantic Scholar
Physical Vapor Deposition - ppt video online download
Section 5 Thin Film Deposition part 1 sputtering
PPT - What determines step coverage in sputtering? PowerPoint Presentation - ID:3373536
Enhanced step coverage by oblique angle physical vapor deposition: Journal of Applied Physics: Vol 97, No 12
Section 5: Thin Film Deposition part 1 : sputtering and evaporation - ppt video online download
Thin films sami franssilaaalto fi 1 D 2
Conformal metal thin-film coatings in high-aspect-ratio trenches using a self-sputtered rf-driven plasma source: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena: Vol 25, No 4
